An area-variant type MEMS capacitive sensor based on a novel bionic swallow structure for high sensitive nano-indentation measurement

Design of Novel High Sensitive MEMS Capacitive Fingerprint Sensor

In this paper a new design of MEMS capacitive fingerprint sensors is presented. The capacitive sensor is made of two parallel plates with air gap. In these sensors, the capacitance changes is very important factor. It is caused by deformation of the upper electrode of sensor. In this study with making slots in upper electrode, using T-shaped protrusion on diaphragm in order to concentrate the f...

A capacitive RF power sensor based on MEMS technology

Wideband 100 kHz–4 GHz power sensors are presented, which are based on sensing the electrostatic force between an RF signal line and a suspended membrane. The electrostatic force, which is proportional to the square of the rms signal voltage and thus to the signal power, results in a displacement of the suspended membrane. This displacement is detected capacitively, allowing the sensing of the ...

Open-circuit sensitivity model based on empirical parameters for a capacitive-type MEMS acoustic sensor

A Study of Silicon based MEMS Capacitive Sensor for Absolute Pressure Measurement of a Specific Range

In this paper two MEMS capacitive pressure sensor of two diffident geometries are designed for measurement of absolute pressure. Both of these sensors are designed as parallel plates where one is movable and the other is fixed. The only difference with common parallel plate structure is that one of the movable plates is supported by four anchors with respect to the fixed plate. Here we have con...

HIGH SENSITIVE ABSOLUTE MEMS CAPACITIVE PRESSURE SENSOR IN SiGeMEMS PROCESS FOR BIOMEDICAL APPLICATIONS

A high sensitive CMOS Micro-electro-mechanical rectangular capacitive pressure sensor in SiGeMEMS process (Silicon Germanium Micro-electro-mechanical System process) is designed and analyzed. Polycrystalline Silicon Germanium (Poly-SiGe) having low fatigue and high strength is effectively used as the sensor diaphragm material to achieve better reliability. The designed perforated diaphragm clam...